共 10 条
- [1] A 65nm logic technology featuring 35nm gate lengths, enhanced channel strain, 8 Cu interconnect layers, low-k ILD and 0.57 μm2 SRAM cell[J]. IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST, 2004, : 657 - 660Bai, P论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAAuth, C论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USABalakrishnan, S论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USABost, M论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USABrain, R论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAChikarmane, V论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAHeussner, R论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAHussein, M论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAHwang, J论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAIngerly, D论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAJames, R论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAJeong, J论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAKenyon, C论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USALee, E论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USALee, SH论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USALindert, N论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USALiu, M论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAMa, Z论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAMarieb, T论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAMurthy, A论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USANagisetty, R论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USANatarajan, S论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USANeirynck, J论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAOtt, A论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAParker, C论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USASebastian, J论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAShaheed, R论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USASivakurnar, S论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USASteigerwald, J论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USATyagi, S论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAWeber, C论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAWoolery, B论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAYeoh, A论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USAZhang, K论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USABohr, M论文数: 0 引用数: 0 h-index: 0机构: Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA Intel Corp, Portland Technol Dev, Hillsboro, OR 97124 USA
- [2] CHEN F, 2004, REL PHYS S P, P501
- [3] ECOJNOMIKOS L, 2004, P 1 PAC RIM C PLAN C, P63
- [4] Integrated electro-chemical mechanical planarization (Ecmp) for future generation device technology[J]. PROCEEDINGS OF THE IEEE 2004 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2004, : 233 - 235Economikos, L论文数: 0 引用数: 0 h-index: 0Wang, X论文数: 0 引用数: 0 h-index: 0Sakamoto, A论文数: 0 引用数: 0 h-index: 0Ong, P论文数: 0 引用数: 0 h-index: 0Naujok, M论文数: 0 引用数: 0 h-index: 0Knarr, R论文数: 0 引用数: 0 h-index: 0Chen, L论文数: 0 引用数: 0 h-index: 0Moon, Y论文数: 0 引用数: 0 h-index: 0Neo, S论文数: 0 引用数: 0 h-index: 0Salfelder, J论文数: 0 引用数: 0 h-index: 0Duboust, A论文数: 0 引用数: 0 h-index: 0Manens, A论文数: 0 引用数: 0 h-index: 0Lu, W论文数: 0 引用数: 0 h-index: 0Shrauti, S论文数: 0 引用数: 0 h-index: 0Liu, F论文数: 0 引用数: 0 h-index: 0Tsai, S论文数: 0 引用数: 0 h-index: 0Swart, W论文数: 0 引用数: 0 h-index: 0
- [5] Reliability, yield, and performance of a 90 nm SOI/Cu/SiCOH technology[J]. PROCEEDINGS OF THE IEEE 2004 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2004, : 214 - 216Edelstein, D论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USADavis, C论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAClevenger, L论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAYoon, M论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USACowley, A论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USANogami, T论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USARathore, H论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAAgarwala, B论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAArai, S论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USACarbone, A论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAChanda, K论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USACohen, S论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USACote, W论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USACullinan, M论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USADalton, T论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USADas, S论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USADavis, P论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USADemarest, J论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USADunn, D论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USADziobkowski, C论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAFilippi, R论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAFitzsimmons, J论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAFlaitz, P论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAGates, S论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAGill, J论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAGrill, A论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAHawken, D论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAIda, K论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAKlaus, D论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAKlymko, N论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USALane, M论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USALane, S论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USALee, J论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USALanders, W论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USALi, WK论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USALin, YH论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USALiniger, E论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USALiu, XH论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAMadan, A论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAMalhotra, S论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAMartin, J论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAMolis, S论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAMuzzy, C论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USANguyen, D论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USANguyen, S论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAOno, M论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAParks, C论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USAQuestad, D论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USARestaino, D论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USASakamoto, A论文数: 0 引用数: 0 h-index: 0机构: IBM Microelect, Hopewell Jct, NY 12533 USA IBM Microelect, Hopewell Jct, NY 12533 USA
- [6] EDELSTEIN D, 2004, REL PHYS S P, P316
- [7] Optimization of SiCOH dielectrics for integration in a 90 nm CMOS technology[J]. PROCEEDINGS OF THE IEEE 2004 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2004, : 54 - 56Grill, A论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAEdelstein, D论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USARestaino, D论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USALane, M论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAGates, S论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USALiniger, E论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAShaw, T论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USALiu, XH论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAKlaus, D论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAPatel, V论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USACohen, S论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USASimonyi, E论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAKlymko, N论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USALane, S论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAIda, K论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAVogt, S论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAVan Kleeck, T论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USADavis, C论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAOno, M论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USANogami, T论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USAIvers, T论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Hts, NY 10598 USA
- [8] Demonstration of an extendable and industrial 300mm BEOL integration for the 65-nm technology node[J]. IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST, 2004, : 317 - 320Hinsinger, O论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceFox, R论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceSabouret, E论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceGoldberg, C论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceVerove, C论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceBesling, W论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceBrun, P论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceJosse, E论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceMonget, C论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceBelmont, O论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceVan Hassel, J论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceSharma, BG论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceJacquemin, JP论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceVannier, P论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceHumbert, A论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceBunel, D论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceGonella, R论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceMastromatteo, E论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceReber, D论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceFarcy, A论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceMueller, J论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceChristie, P论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceNguyen, VH论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceCregut, C论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, FranceBerger, T论文数: 0 引用数: 0 h-index: 0机构: STMicroelect, F-38926 Crolles, France STMicroelect, F-38926 Crolles, France
- [9] Chip-to-package interaction for a 90 nm Cu/PECVD Low-k technology[J]. PROCEEDINGS OF THE IEEE 2004 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2004, : 108 - 110Landers, W论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAEdelstein, D论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAClevenger, L论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USADas, S论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAYang, CC论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAAoki, T论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USABeaulieu, F论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USACasey, J论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USACowley, A论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USACullinan, M论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USADaubenspeck, T论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USADavis, C论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USADemarest, J论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USADuchesne, E论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAGuerin, L论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAHawken, D论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAIvers, T论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USALane, M论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USALiu, X论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USALombardi, T论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAMcCarthy, C论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAMuzzy, C论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USANadeau-Filteau, J论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAQuestad, D论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USASauter, W论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAShaw, T论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USAWright, J论文数: 0 引用数: 0 h-index: 0机构: IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA IBM Corp, Semicond Res & Dev Ctr, Hopewell Jct, NY 12533 USA
- [10] From PVD to CVD to ALD for interconnects and related applications[J]. PROCEEDINGS OF THE IEEE 2001 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2001, : 3 - 5Rossnagel, SM论文数: 0 引用数: 0 h-index: 0机构: IBM Res Corp, Yorktown Hts, NY 10598 USA IBM Res Corp, Yorktown Hts, NY 10598 USAKim, H论文数: 0 引用数: 0 h-index: 0机构: IBM Res Corp, Yorktown Hts, NY 10598 USA IBM Res Corp, Yorktown Hts, NY 10598 USA