Spatially resolved electron energy distribution function measurements in a nitrogen RF discharge

被引：0

作者：

Tatarova, E

Stoykova, E

Zhelyazkov, I

Bachev, K

Karadjov, I

Djermanova, N

Ghanashev, I

机构：

来源：

ICPP 96 CONTRIBUTED PAPERS - PROCEEDINGS OF THE 1996 INTERNATIONAL CONFERENCE ON PLASMA PHYSICS, VOLS 1 AND 2 | 1997年

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中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The spatial profile of the electron energy distribution function (EEDF) of a capacitive nitrogen discharge at a frequency of 27 MHz has been measured at pressures 70-400 mTorr. The RF power dissipated is 10-30 W. The measurements are performed by means of a computer controlled data-acquisition system (with cross-modulation technique applied). A passive method for compensation of the RF field influence on probe measurements has been used. The measured electron energy distribution functions at pressure of 400 mTorr are markedly non-Maxwellian. A strong decrease in the energy range of 2-5 eV is due to the dominant electron-molecule energy exchange processes. A different axial behaviour is observed at lower pressures. At 70 mTorr the EEDF exhibits a trend to a non-local plasma response.

引用

页码：1522 / 1525

页数：4