DESIGN, REALIZATION AND CHARACTERIZATION OF ALL-ARROUND SiO2/Al2O3 GATE, SUSPENDED SILICON NANOWIRE CHEMICAL FIELD EFFECT TRANSISTORS

被引：0

作者：

Lale, Ahmet ^{[1
]}

Grappin, Auriane ^{[1
]}

Bourrier, David ^{[1
]}

Mazenq, Laurent ^{[1
]}

Lecestre, Aurehe ^{[1
]}

Launay, Jerome ^{[1
]}

Temple-Boyer, Pierre ^{[1
]}

机构：

[1] Univ Toulouse, LAAS, CNRS, F-31400 Toulouse, France

来源：

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年

关键词：

ChemFET; finFET; MOSFET; ISFET; silicon nanowire; biosensor; potentiometric sensor; nanosensor; microsensor; pH measurement; microfluidics; gate all-around; NERVE-CELLS; PH;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a sensor platform associated to silicon-nanowire chemical field effect transistors (Si-nw-ChemFET). Innovations concern the use of networks of suspended silicon N+/P/N+ nanowires as conducting channel, the realization by thermal oxidation and Atomic-Layer Deposition (ALD) of a SiO2/Al2O3 gate insulator all-around the silicon nanowires, and their final integration into covered SU8-based microfluidic channels. The Si-nw-MOSFET/ChemFET fabrication process and electrical/electrochemical characterizations are presented. The fabrication process did not need an expensive and time-consuming e-beam lithography, but only fast and "low cost" standard photolithography protocols. Such microdevice will provide new opportunities for biochemical analysis at the micro/nanoscale.

引用

页码：1508 / 1511

页数：4

共 14 条

[1] DEVELOPMENT OF AN ION-SENSITIVE SOLID-STATE DEVICE FOR NEUROPHYSIOLOGICAL MEASUREMENTS
BERGVELD, P
[J]. IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1970, BM17 (01) : 70 - &
[2] Development of pH-based ElecFET biosensors for lactate ion detection
Diallo, A. K.
Djeghlaf, L.
Mazenq, L.
Launay, J.
Sant, W.
Temple-Boyer, P.
[J]. BIOSENSORS & BIOELECTRONICS, 2013, 40 (01) : 291 - 296
[3] Duan XJ, 2012, NAT NANOTECHNOL, V7, P174, DOI [10.1038/nnano.2011.223, 10.1038/NNANO.2011.223]
[4] Conformal coating on ultrahigh-aspect-ratio nanopores of anodic alumina by atomic layer deposition
Elam, JW
Routkevitch, D
Mardilovich, PP
George, SM
[J]. CHEMISTRY OF MATERIALS, 2003, 15 (18) : 3507 - 3517
[5] Fromherz P, 2002, CHEMPHYSCHEM, V3, P276, DOI 10.1002/1439-7641(20020315)3:3<276::AID-CPHC276>3.0.CO
[6] 2-A
[7] Joining microelectronics and microionics: Nerve cells and brain tissue on semiconductor chips
Fromherz, Peter
[J]. SOLID-STATE ELECTRONICS, 2008, 52 (09) : 1364 - 1373
[8] pH, pK and pNa detection properties of SiO2/Si3N4 ISFET chemical sensors
Hajji, B
Temple-Boyer, P
Launay, J
do Conto, T
Martinez, A
[J]. MICROELECTRONICS RELIABILITY, 2000, 40 (4-5) : 783 - 786
[9] Development of pNH4-ISFETS microsensors for water analysis
Humenyuk, I
Torbiéro, B
Assié-Souleille, S
Colin, R
Dollat, X
Franc, B
Martinez, A
Temple-Boyer, P
[J]. MICROELECTRONICS JOURNAL, 2006, 37 (06) : 475 - 479
[10] Dual Gated Silicon Nanowire Field Effect Transistors
Knopfmacher, O.
Keller, D.
Calame, M.
Schoenenberger, C.
[J]. PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01): : 678 - 681

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