Effect of radical oxygen gas exposure on Pt field emitter fabricated by electron-beam induced deposition

被引：0
|
作者：
Murakami, K. [1 ]
Abe, S. [2 ]
Nishihara, S. [2 ]
Abo, S. [1 ]
Wakaya, F. [1 ,2 ]
Takai, M. [1 ,2 ]
机构：
[1] Osaka Univ, Ctr Quantum Sci & Technol Under Extreme Condit, 1-3 Machikaneyama, Osaka 5608531, Japan
[2] Osaka Univ, Grad Sch Engn Sci, Osaka 5608531, Japan
来源：
2007 IEEE 20TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE | 2007年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：25 / +
页数：2
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