Bias-enhanced nucleation and growth of the aligned carbon nanotubes with open ends under microwave plasma synthesis

被引：140

作者：

Tsai, SH ^{[1
]}

Chao, CW ^{[1
]}

Lee, CL ^{[1
]}

Shih, HC ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

来源：

APPLIED PHYSICS LETTERS | 1999年 / 74卷 / 23期

关键词：

D O I：

10.1063/1.124128

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Aligned carbon nanotubes with open ends have been fabricated on silicon wafer in one step using a microwave plasma enhanced chemical vapor deposition system with a mixture of methane and hydrogen as precursors. High concentration hydrogen plasma and high negative bias voltage to the substrate induce anisotropic etching of carbon nanotubes and can effectively reduce the randomly oriented carbon nanotubes. The mechanism of aligned carbon nanotubes with open ends is proposed in this letter. (C) 1999 American Institute of Physics. [S0003-6951(99)02223-8].

引用

页码：3462 / 3464

页数：3

共 20 条

[1] Carbon nanotubule membranes for electrochemical energy storage and production
Che, GL
Lakshmi, BB
Fisher, ER
Martin, CR
[J]. NATURE, 1998, 393 (6683) : 346 - 349
[2] REDUCTIVE DEPOSITION OF PD ON POROUS SILICON FROM AQUEOUS-SOLUTIONS OF PDCL2 - AN X-RAY-ABSORPTION FINE-STRUCTURE STUDY
COULTHARD, I
JIANG, DT
LORIMER, JW
SHAM, TK
FENG, XH
[J]. LANGMUIR, 1993, 9 (12) : 3441 - 3445
[3] Storage of hydrogen in single-walled carbon nanotubes
Dillon, AC
Jones, KM
Bekkedahl, TA
Kiang, CH
Bethune, DS
Heben, MJ
[J]. NATURE, 1997, 386 (6623) : 377 - 379
[4] Self-oriented regular arrays of carbon nanotubes and their field emission properties
Fan, SS
Chapline, MG
Franklin, NR
Tombler, TW
Cassell, AM
Dai, HJ
[J]. SCIENCE, 1999, 283 (5401) : 512 - 514
[5] Filled carbon nanotubes could lead to improved catalysts and biosensors
Freemantle, M
[J]. CHEMICAL & ENGINEERING NEWS, 1996, 74 (29) : 62 - 66
[6] NEW ONE-DIMENSIONAL CONDUCTORS - GRAPHITIC MICROTUBULES
HAMADA, N
SAWADA, S
OSHIYAMA, A
[J]. PHYSICAL REVIEW LETTERS, 1992, 68 (10) : 1579 - 1581
[7] Growth of highly oriented carbon nanotubes by plasma-enhanced hot filament chemical vapor deposition
Huang, ZP
Wu, JW
Ren, ZF
Wang, JH
Siegal, MP
Provencio, PN
[J]. APPLIED PHYSICS LETTERS, 1998, 73 (26) : 3845 - 3847
[8] Epitaxial carbon nanotube film self-organized by sublimation decomposition of silicon carbide
Kusunoki, M
Rokkaku, M
Suzuki, T
[J]. APPLIED PHYSICS LETTERS, 1997, 71 (18) : 2620 - 2622
[9] DIRECT-CURRENT BIAS EFFECT ON THE SYNTHESIS OF (001)-TEXTURED DIAMOND FILMS ON SILICON
LEE, JS
LIU, KS
LIN, IN
[J]. APPLIED PHYSICS LETTERS, 1995, 67 (11) : 1555 - 1557
[10] Large-scale synthesis of aligned carbon nanotubes
Li, WZ
Xie, SS
Qian, LX
Chang, BH
Zou, BS
Zhou, WY
Zhao, RA
Wang, G
[J]. SCIENCE, 1996, 274 (5293) : 1701 - 1703

← 1 2 →