High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication

被引：11

作者：

Du, Yu ^{[1
,2
]}

Zhou, Guangya ^{[1
]}

Cheo, Kelvin K. L. ^{[1
]}

Zhang, Qingxin ^{[2
]}

Feng, Hanhua ^{[2
]}

Yang, Bin ^{[2
]}

Chau, Fook Siong ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Mech Engn, Micro & Nano Syst Initiat, Singapore 117576, Singapore

[2] Inst Microelect, Singapore 117685, Singapore

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2009年 / 156卷 / 01期

关键词：

Diffraction grating; Micro-scanners; Micro-opto-electromechanical systems (MOEMS); PERFORMANCE; MIRRORS;

D O I：

10.1016/j.sna.2009.02.011

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we report a design, modeling and fabrication of a microelectromechanical system (MEMS) based in-plane vibratory sub-wavelength diffraction grating scanner for high optical efficiency, high speed laser scanning applications. This paper demonstrates that with careful design, optical efficiency of more than 75% is experimentally achievable with a simple gold-coated binary sub-wavelength grating. High frequency scanning of 55.01 kHz with an optical scan angle of 5.2 degrees is achievable even when operated in air. The device demonstrated has a 1 mm diameter grating. Through consideration of the mass of the suspension springs, stress alleviation beams and fabrication imperfections, a theoretical model is proposed which can estimate the dynamic performance close to the actual operating condition. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：134 / 144

页数：11

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