Tracking control of a large range 3D printed compliant nano-manipulator with enhanced anti-windup compensation

被引:13
作者
Cui, Mengjia [1 ,2 ,3 ]
Zhang, Zhen [1 ,2 ,3 ]
Yan, Peng [4 ]
机构
[1] Tsinghua Univ, State Key Lab Tribol, Dept Mech Engn, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Inst Mfg Engn, Dept Mech Engn, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Beijing Key Lab Precis Ultraprecis Mfg Equipments, Beijing 100084, Peoples R China
[4] Shandong Univ, Sch Mech Engn, Key Lab High Efficiency & Clean Mech Mfg, Minist Educ, Jinan 250061, Shandong, Peoples R China
基金
中国国家自然科学基金;
关键词
Nano-positioning; Tracking; Compliant mechanism; Anti-windup; DESIGN; SYSTEMS;
D O I
10.1016/j.ymssp.2019.05.029
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
This paper studies tracking of a large stroke 3D printed XY compliant nano-manipulator with spatial constraints. To asymptotically track periodic references, an internal model principle-based control is utilized as the baseline tracking controller. To avoid the actuator input saturation in relatively large stroke, an enhanced anti-windup scheme with an integrated compensation strategy is developed, where the anticipatory anti-windup compensator and the conventional one are adopted in different operation modes. The design of the modified anti-windup compensator is decoupled with the internal model principle-based controller to facilitate the integrated control design. The synthesis of linear matrix inequality (LMI) is also provided to obtain the parameters of the dynamic anti-windup compensator. The proposed control strategy is experimentally validated, where the tracking error is 62.54 nm (RMS) in absence of saturation and significant error reduction in the presence of saturation is demonstrated compared with the conventional anti-windup compensation. (C) 2019 Elsevier Ltd. All rights reserved.
引用
收藏
页码:33 / 48
页数:16
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