Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases

被引：4
|
作者：
Narishige, S [1 ]
Kitamura, S
Sakemi, S
Tomita, K
Uchino, K
Muraoka, K
Sakoda, T
机构：
[1] Kyushu Univ, Interdisciplinary Grad Sch Engn Sci, Kasuga, Fukuoka 8168580, Japan
[2] Kitakyushu Natl Coll Technol, Kitakyushu, Fukuoka 8020985, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2002年 / 41卷 / 11A期
关键词：
Thomson scattering; Raman scattering; reactive gas; electron density; electron temperature; processing plasma; molecules;
D O I：
10.1143/JJAP.41.L1259
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In Thomson scattering measurements of processing plasmas, rotational Raman scattering light from molecules sometimes overlaps the observed spectra. In order to solve this problem, a new method is proposed. This method involves separating the Thomson scattering component from the Raman scattering component by utilizing differences in the scattering characteristics depending on scattering wavelength and scattering geometry. By using this method, electron densities and electron temperatures of a microwave discharge plasma produced in a H-2/CH4 gas mixture at a moderate pressure were successfully measured for the first time.
引用
收藏
页码：L1259 / L1262
页数：4
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