Real-time imaging of surface acoustic waves in thin films and microstructures on opaque substrates (invited)

被引：14

作者：

Sugawara, Y ^{[1
]}

Wright, OB ^{[1
]}

Matsuda, O ^{[1
]}

机构：

[1] Hokkaido Univ, Fac Engn, Dept Appl Phys, Sapporo, Hokkaido 0608628, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2003年 / 74卷 / 01期

关键词：

D O I：

10.1063/1.1520323

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present a real-time imaging technique for surface acoustic waves on samples with opaque substrates. We image the surface acoustic wave propagation on a silicon substrate coated with a gold film, and derive the dispersion relation for propagation in symmetry directions. In addition, we image surface acoustic waves at frequencies up to 2 GHz on a diamond substrate coated with a gold film, and on a microstructure deposited on a silicon substrate. (C) 2003 American Institute of Physics.

引用

页码：519 / 522

页数：4

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