共 50 条
- [22] Electrical characteristics of HfO2 films on InP with different atomic-layer-deposition temperatures PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2013, 210 (07): : 1381 - 1385
- [24] Operando study of HfO2 atomic layer deposition on partially hydroxylated Si(111) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2024, 42 (02):
- [27] Research of Atomic Layer Deposited HfO2/TiO2 Multilayer Structures by Spectroscopic and Multiangle Monochromatic Null Ellipsometry 2018 19TH INTERNATIONAL CONFERENCE OF YOUNG SPECIALISTS ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES (EDM 2018), 2018, : 26 - 29
- [29] Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2011, 5 (01): : 19 - 21