Lead zirconate titanate and barium titanate bi-layer ferroelectric films on Si

被引：11

作者：

Wang, Yingying ^{[1
,2
,3
]}

Yan, Jing ^{[1
]}

Cheng, Hongbo ^{[1
,4
]}

Chen, Ning ^{[2
]}

Yan, Peng ^{[2
]}

Yang, Feng ^{[5
]}

Ouyang, Jun ^{[1
,3
]}

机构：

[1] Shandong Univ, Sch Mat Sci & Engn, Key Lab Liquid Solid Struct Evolut & Proc Mat, Minist Educ, Jinan 250061, Shandong, Peoples R China

[2] Shandong Univ, Sch Mech Engn, Jinan 250061, Shandong, Peoples R China

[3] Shandong Univ, Suzhou Inst, Suzhou 215123, Peoples R China

[4] Nanjing Univ Posts & Telecommun, Coll Elect & Opt Engn, Nanjing 210023, Jiangsu, Peoples R China

[5] Univ Jinan, Sch Mat Sci & Engn, Jinan 250022, Shandong, Peoples R China

来源：

CERAMICS INTERNATIONAL | 2019年 / 45卷 / 07期

基金：

中国国家自然科学基金;

关键词：

Lead zirconate titanate (PZT); Barium titanate (BaTiO3); Bi-layer; Ferroelectric film; Si; Magnetron sputtering; PZT THIN-FILMS; ELECTRICAL-PROPERTIES; PIEZOELECTRIC CONSTANTS; TARGET; BIFEO3;

D O I：

10.1016/j.ceramint.2019.01.237

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this work, a novel method is proposed to integrate ferroelectric lead zirconate titanate (PZT) films on Si with highly tunable functionalities, through bi-layering with a barium titanate (BTO) film. First of all, the BTO film acts as a growth-promotion template layer which has successfully lowered the in situ deposition temperature of a ferroelectric PZT film. The PZT/BTO bilayer film deposited at 350 degrees C on LaNiO3-buffered Si substrate displayed a room temperature remnant polarization similar to 24 mu C/cm(2), and its quality can be further improved via a rapid thermal annealing (RTP) process. Furthermore, by changing their thickness ratio, various ferroelectric hysteresis loops (P-E loops) can be created in the PZT/BTO films, thereby enabling a broad range of applications for this simple bi-layer structure. Examples including high performance piezoelectric energy harvesters and high energy density dielectric capacitors are demonstrated for the PZT/BTO bi-layer films.

引用

页码：9032 / 9037

页数：6

共 33 条

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