A 0.1 G-to-20 G integrated MEMS inertial sensor

被引：9

作者：

Yamane, Daisuke ^{[1
,4
]}

Konishi, Toshifumi ^{[2
]}

Matsushima, Takaaki ^{[2
]}

Toshiyoshi, Hiroshi ^{[3
,4
]}

Masu, Kazuya ^{[1
,4
]}

Machida, Katsuyuki ^{[1
,2
,4
]}

机构：

[1] Tokyo Inst Technol, Yokohama, Kanagawa 2268503, Japan

[2] NTT Adv Technol Corp, Atsugi, Kanagawa 2430124, Japan

[3] Univ Tokyo, Meguro Ku, Tokyo 1538904, Japan

[4] JST, CREST, Kawaguchi, Saitama 3320012, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2015年 / 54卷 / 08期

关键词：

ACCELEROMETER; FABRICATION; INTERFACE;

D O I：

10.7567/JJAP.54.087202

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper presents a novel integrated MEMS inertial sensor with a wide range of acceleration from 0.1G to 20 G (G = 9.8 m/s(2)) and with a design suitable for CMOS integration. Owing to the high-density of post-processed gold and the multi-metal layer technology, we have implemented different types of single-axis MEMS capacitive inertial sensors on a single chip of 4 x 4 mm(2) in area to obtain a wide sensing range. The estimated Brownian noise was between 82.4 nG/Hz(1/2) and 1.11 mu G/Hz(1/2). The experimental results show that the MEMS sensor has higher sensing resolution than those of conventional MEMS accelerometers. (C) 2015 The Japan Society of Applied Physics

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页数：4

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