共 8 条
[1]
High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG-lasers
[J].
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING IV,
1999, 3618
:348-356
[4]
Madou M.J., 2001, FUNDAMENTALS MICROFA
[6]
PHAM DT, 2001, P 17 NAT C MAN RES L, P211
[8]
1999, OPERATING MANUAL