Fabrication of micrometer-scale, patterned polyhedra by self-assembly

被引：0

作者：

Gracias, DH ^{[1
]}

Kavthekar, V ^{[1
]}

Love, JC ^{[1
]}

Paul, KE ^{[1
]}

Whitesides, GM ^{[1
]}

机构：

[1] Harvard Univ, Dept Chem & Biol Chem, Cambridge, MA 02138 USA

来源：

ADVANCED MATERIALS | 2002年 / 14卷 / 03期

关键词：

Crystal microstructure - Light emitting diodes - Micromachining - Photolithography - Scanning electron microscopy - Self assembly - Single crystals - Surface tension;

D O I：

10.1002/1521-4095(20020205)14:3<235::AID-ADMA235>3.0.CO;2-B

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Small, 3D, polyhedral structures based on existing 2D microfabrication technology have been fabricated by a novel technique. The method is based on self-folding of a 2D structure into the final 3D form due to the surface tension of solder, which covers the joints. Patterned polyhedra (see Figure) and structures with silicon single crystal chips on each face are accessible.

引用

页码：235 / +

页数：5

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