The mechanism of initial de-wetting and detachment of thin Au films on YSZ

被引:72
作者
Shaffir, E. [2 ]
Riess, I. [2 ]
Kaplan, W. D. [1 ]
机构
[1] Technion Israel Inst Technol, Dept Mat Engn, IL-32000 Haifa, Israel
[2] Technion Israel Inst Technol, Dept Phys, IL-32000 Haifa, Israel
关键词
De-wetting; Voids; Interface defects; Capillary phenomena; Thin films; METAL-CERAMIC INTERFACES; ALUMINUM-ALUMINA INTERFACE; INTERGRANULAR FILMS; SAPPHIRE INTERFACES; SURFACE-DIFFUSION; LIQUID ALUMINUM; WIRE-BONDS; GROWTH; WATER; CHEMISTRY;
D O I
10.1016/j.actamat.2008.09.004
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin Au layers on single crystal Y2O3-doped ZrO2 (YSZ) de-wet from the substrate during thermal annealing in the solid state, and form small crystalline particles. Voids in the film nucleate at the metal-ceramic interface, and then grow to form pinholes in the film. Thus void nucleation at the metal-ceramic interface was identified to be the mechanism for solid-state de-wetting, rather than grain boundary grooving at the free Surface of the film. Eventually, complete de-wetting occurs via solid-state diffusion, driven by minimization of the surface and interface energies of the system. In parallel to the de-wetting process, bubbles form in the film, driven by compressive thermal stresses and by the pressure exerted by.-as chemisorbed from the substrate. (C) 2008 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:248 / 256
页数:9
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