Oxygen-induced bi-modal failure phenomenon in SiOx-based resistive switching memory

被引:30
作者
Chang, Yao-Feng [1 ]
Ji, Li [1 ]
Wu, Zhuo-Jie [1 ]
Zhou, Fei [1 ]
Wang, Yanzhen [1 ]
Xue, Fei [1 ]
Fowler, Burt [2 ]
Yu, Edward T. [1 ]
Ho, Paul S. [1 ]
Lee, Jack C. [1 ]
机构
[1] Univ Texas Austin, Dept Elect & Comp Engn, Microelect Res Ctr, Austin, TX 78758 USA
[2] PrivaTran LLC, Austin, TX 78746 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.4816162
中图分类号
O59 [应用物理学];
学科分类号
摘要
The ambient gas effect in SiOx-based resistive switching memory has been studied. After the electroforming process, resistive switching behavior functions in vacuum as well as in nitrogen without dramatic degradation. However, introducing an oxygen-nitrogen ambient suppresses resistive switching behavior at pressures above 1 Torr. Resistive switching is fully reestablished in oxygen-exposed devices after a vacuum recovery step. The failure phenomena can be described by Monte Carlo simulation using bi-modal statistics to enable feature distribution modeling of failure modes. Design criteria and guidelines are identified for packaging of future oxygen-sensor and of nonvolatile memory applications. (C) 2013 AIP Publishing LLC.
引用
收藏
页数:4
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