Monte Carlo simulation of low-field mobility in strained double gate SOI transistors

Electron transport in strained double gate silicon on insulator transistors has been studied by Monte Carlo method. Poisson and Schroedinger equations have been self-consistently solved in these devices for different silicon layer thicknesses both for unstrained and strained silicon channels. The results show that the strain of the silicon layer leads to a larger population of the no-primed subbands, thus decreasing the average conduction effective mass. However, strain also contributes to a larger confinement of the charge close to the two Si/SiO2 interfaces, thus weakening the volume inversion effect, and limiting the potential increase of the phonon limited mobility.