Formation of Surface Alloys With a Low-Energy High-Current Electron Beam for Improving High-Voltage Hold-Off of Copper Electrodes

被引：29
作者：
Markov, Alexey B. [1 ]
Yakovlev, Evgeny V. [1 ]
Petrov, Vsevolod I. [1 ]
机构：
[1] Inst High Current Elect SB RAS, Tomsk 634055, Russia
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 2013年 / 41卷 / 08期
关键词：
Film deposition; high-voltage hold-off; magnetron sputtering; pulsed electron beam; surface alloying; VACUUM BREAKDOWN; IRRADIATION;
D O I：
10.1109/TPS.2013.2254501
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Electrical breakdown and tribological properties of multicomponent surface alloys of stainless steel (SS)-Cu formed on Cu substrate with a low-energy high-current electron beam (LEHCEB) of microsecond duration are investigated. Formation of surface alloys is performed using deposition of SS films by means of magnetron sputtering followed by an LEHCEB liquid-phase mixing of the film and the top layer of substrate in a single vacuum cycle. A thickness of formed SS-Cu alloys is ranging within 1-10 mu m. Investigation of electrical breakdown of Cu electrodes with formed SS-Cu surface alloy showed almost three times increase in the high-voltage hold-off (1 MV/cm) compared with that for initial Cu electrodes (0.35 MV/cm). The gained high-voltage hold-off appears to be equal to that for electrodes made of SS and treated with an LEHCEB. Scratch tests revealed the significant improving adhesion of surface alloys to a substrate compared with that for the common magnetron-deposited coating of the same thickness.
引用
收藏
页码：2177 / 2182
页数：6
相关论文
共 14 条
[1]   THE EFFECT OF PULSED ELECTRON-BEAM TREATMENT OF ELECTRODES ON VACUUM BREAKDOWN [J].
BATRAKOV, AV ;
MARKOV, AB ;
OZUR, GE ;
PROSKUROVSKY, DI ;
ROTSHTEIN, VP .
IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION, 1995, 2 (02) :237-242
[2]   Surface treatment by high current pulsed electron beam [J].
Dong, C ;
Wu, A ;
Hao, S ;
Zou, J ;
Liu, Z ;
Zhong, P ;
Zhang, A ;
Xu, T ;
Chen, J ;
Xu, J ;
Liu, Q ;
Zhou, Z .
SURFACE & COATINGS TECHNOLOGY, 2003, 163 :620-624
[3]   Pulsed HV vacuum breakdown of polished, powder coated, and E-beam treated large area stainless steel electrodes with 0.5 to 7 mm gaps [J].
Johnson, DJ ;
Savage, ME ;
Sharpe, RA ;
Batrakov, AV ;
Proskurovsky, DI .
IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION, 2006, 13 (01) :52-64
[4]  
Kehne D., 2001, PACS2001. Proceedings of the 2001 Particle Accelerator Conference (Cat. No.01CH37268), P864, DOI 10.1109/PAC.2001.986504
[5]  
Markov A. B., 2010, P 24 ISDEIV INT S DI, P486
[6]   Calculation and experimental determination of dimensions of hardening and tempering zones in quenched U7A steel irradiated with a pulsed electron beam [J].
Markov, AB ;
Rotshtein, VP .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 132 (01) :79-86
[7]   Surface alloying by pulsed intense electron beams [J].
Mueller, G ;
Engelko, V ;
Weisenburger, A ;
Heinzel, A .
VACUUM, 2005, 77 (04) :469-474
[8]   Production and application of low-energy, high-current electron beams [J].
Ozur, GE ;
Proskurovsky, DI ;
Rotshtein, VP ;
Markov, AB .
LASER AND PARTICLE BEAMS, 2003, 21 (02) :157-174
[9]   Pulsed electron-beam technology for surface modification of metallic materials [J].
Proskurovsky, DI ;
Rotshtein, VP ;
Ozur, GE ;
Markov, AB ;
Nazarov, DS ;
Shulov, VA ;
Ivanov, YF ;
Buchheit, RG .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (04) :2480-2488
[10]   Surface alloying of stainless steel 316 with copper using pulsed electron-beam melting of film-substrate system [J].
Rotshtein, V. P. ;
Ivanov, Yu. F. ;
Markov, A. B. ;
Proskurovsky, D. I. ;
Karlik, K. V. ;
Oskomov, K. V. ;
Uglov, B. V. ;
Kuleshov, A. K. ;
Novitskaya, M. V. F. ;
Dub, S. N. ;
Pauleau, Y. ;
Shulepov, I. A. .
SURFACE & COATINGS TECHNOLOGY, 2006, 200 (22-23) :6378-6383
12