Optical and structural properties of ZnO/TiO2/ZnO multi-layers prepared via electron beam evaporation

被引：43

作者：

Choi, Won Seok ^{[1
]}

Kim, Eui Jung ^{[2
]}

Seong, Seung Gie ^{[1
]}

Kim, Yong Soo ^{[1
]}

Park, Chinho ^{[3
]}

Hahn, Sung Hong ^{[1
]}

机构：

[1] Univ Ulsan, Dept Phys, Ulsan 680749, South Korea

[2] Univ Ulsan, Dept Chem Engn, Ulsan 680749, South Korea

[3] Yeungnam Univ, Sch Display & Chem Engn, Kyongsan 712749, South Korea

来源：

VACUUM | 2009年 / 83卷 / 05期

关键词：

Electron beam evaporation; ZnO; Thin films; TiO2 buffer layer; Photoluminescence; ZNO THIN-FILMS; PULSED-LASER DEPOSITION; ZINC-OXIDE; GAS SENSOR; BAND-EDGE; PHOTOLUMINESCENCE; SAPPHIRE; NANORODS; LAYER; AL;

D O I：

10.1016/j.vacuum.2008.09.006

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We prepared a ZnO/TiO2/ZnO multi-layer on quartz glass substrate via electron beam evaporation. Optical and structural properties of the ZnO/TiO2/ZnO multi-layer were investigated. The TiO2 buffer layer is found to improve the crystallinity of the ZnO thin film. A green emission of the ZnO thin film deposited on the TiO2 buffer layer was significantly enhanced due to the increased defect concentration of oxygen vacancy. Photoluminesence spectra measured at 9 K revealed that a violet luminescence at 409 nm was attributed to the draft of the donor's defect levels in the ZnO thin film. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：878 / 882

页数：5

共 27 条

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