Nano-roughness assessment by light scattering measurement

被引：4

作者：

Schröder, S

Duparré, A

Tünnermann, A

机构：

[1] Fraunhofer Inst Angew Opt & Feinmechan, Abt Opt Syst, Arbeitsgrp Oberflachen & Schichtcharakterisierung, D-07745 Jena, Germany

[2] Univ Jena, Fak Phys Astron, IAP, D-07745 Jena, Germany

来源：

TM-TECHNISCHES MESSEN | 2006年 / 73卷 / 01期

关键词：

nanostructure; metrology; light scattering; roughness; functional surfaces;

D O I：

10.1524/teme.2006.73.1.35

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The tremendous development in the field of nanotechnologies results in novel challenges for industry-tailored measurement techniques. This in particular holds for methods to determine roughness as well as functional parameters. Light scattering techniques involve major benefits to meet these requirements. The basics and concepts for their adaptation to close-to-process measurement are investigated in the project NanoScatt, part of the DFG priority programme SPP 1159.

引用

页码：35 / 42

页数：8

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