Positioning system and lattice design for subaperture stitching interferometry

被引:3
|
作者
Kredba, Jan [1 ]
Psota, Pavel [1 ]
机构
[1] Acad Sci Czech Republic, Inst Plasma Phys, Reg Ctr Special Opt & Optoelect Syst TOPTEC, Slovankou 1782-3, Prague 18200 8, Czech Republic
来源
OPTICS AND MEASUREMENT INTERNATIONAL CONFERENCE 2016 | 2016年 / 10151卷
关键词
interferometry; lattice design; stitching; positioning system; metrology;
D O I
10.1117/12.2257310
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The demands on the quality of large aperture spherical and mild aspheric optical surfaces continue to rise in modern optical systems. Due to the aperture size of these surfaces measuring of their shape is quite problematic. One of the ways to measure these surfaces is the subaperture stitching interferometry. Its accuracy is highly depended on lattice design and accuracy of the positioning system. Optimal lattice design in relation to transmission element applied in interferometer together with coordinates calculation for the positioning system for measuring individual subapertures is the subject of this paper. To set the required orientation and position of the optical surface relative to the interferometer positioning system with six degrees of freedom was used. Three of them were realized as prismatic kinematic pairs and remaining three as revolution joints. In this paper the choice of coordinate systems for individual axes of the positioning system together with inverse kinematics used for setting the correct position and orientation of the optical surface are described.
引用
收藏
页数:12
相关论文
共 50 条
  • [21] Subaperture stitching algorithms: A comparison
    Chen, Shanyong
    Xue, Shuai
    Wang, Guilin
    Tian, Ye
    OPTICS COMMUNICATIONS, 2017, 390 : 61 - 71
  • [22] Subaperture moving strategy and related systematic errors in stitching interferometry of X-ray mirrors
    Wu, Qiaoyu
    Huang, Qiushi
    Zhang, Wenwen
    Shi, Zhao
    Li, Ming
    Zhang, Changrui
    He, Yumei
    Luo, Hongxin
    Yu, Jun
    Gu, Weichen
    Zhang, Zhong
    Wang, Zhanshan
    OPTICS EXPRESS, 2024, 32 (26): : 45691 - 45706
  • [23] A new form measurement system based on subaperture stitching with a line-scanning interferometer
    Laubach, Soeren
    Ehret, Gerd
    Riebeling, Joerg
    Lehmann, Peter
    ADVANCED OPTICAL TECHNOLOGIES, 2016, 5 (5-6) : 415 - 422
  • [24] Stitching interferometry using alternating calibration of positioning and systematic errors
    Zong, Yi
    Yu, Caiyun
    Liu, Weijian
    Liu, Yixuan
    Zhong, Yongshen
    Huang, Huitong
    Duan, Mingliang
    Li, Jianxin
    OPTICS EXPRESS, 2024, 32 (09): : 16437 - 16454
  • [25] A subaperture stitching algorithm for aspheric surfaces
    Lin, Po-Chih
    Chen, Yi-Chun
    Lee, Chung-Min
    Liang, Chao-Wen
    OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VII, 2011, 8082
  • [26] Subaperture stitching computation time optimization using a system of linear equations
    Stasik, Marek
    Psota, Pavel
    Ledl, Vit
    Kredba, Jan
    APPLIED OPTICS, 2021, 60 (27) : 8556 - 8568
  • [27] Effect of Reference Surface Error on Subaperture Stitching for Flat Optics
    Li Mengyang
    Cao Tingfen
    Yuan Xiaodong
    Zhang Jinli
    Liu Changchun
    Yi Congzhi
    Chen Haiping
    Quan Xusong
    CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG, 2019, 46 (12):
  • [28] Experimental study on subaperture stitching testing of convex hyperboloid surface
    Zhu, Deyan
    Yan, Lisong
    Wang, Xiaokun
    Li, Ming
    Ma, Donglin
    Chao, Lianying
    OPTICS COMMUNICATIONS, 2018, 428 : 104 - 109
  • [29] Subaperture Stitching Based on Hartmann Wavefront Sensor
    He Yu-mei
    Tang Guo-mao
    5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, 2010, 7656
  • [30] Optical form measurement employing a tiltable line scanning, low coherence interferometer for annular subaperture stitching interferometry
    Schake, Markus
    Riebeling, Jorg
    Lehmann, Peter
    Ehret, Gerd
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2021, 32 (10)