High-Temperature Oxidation Resistance of CrMoN Films

The CrMoN film is deposited on the surface of M2 tool steel using the closed-field unbalanced magnetron sputtering technology. We measured the surface morphology, composition, phase structure, hardness and film/base bonding strength of CrMoN film using a scanning electron microscope, x-ray diffractometer, nano-indenter and scratch tester after oxidation at room temperature, 500, 600, and 700 degrees C for 1 h. The results of this study demonstrated that the crystal structure and mechanical property of CrMoN film at room temperature are maintained after oxidation at 500 degrees C for 1 h. In addition, with the increase in oxidation temperature, there is an increase in the evaporation of MoO(3)on the film surface and the oxidation degree of the film along with the appearance of fine pores. Moreover, the mechanical property and film/base bonding strength of CrMoN film significantly decrease after oxidization at 700 degrees C for 1 h.