Microstructure and tribological properties of Ti(Cr)SiCN coating deposited by plasma enhanced magnetron sputtering

被引：33
作者：
Li, Qiang [1 ]
Jiang, Fan-qing [1 ]
Leng, Yong-xiang [1 ]
Wei, Rong-hua [2 ]
Huang, Nan [1 ]
机构：
[1] SW Jiaotong Univ, Key Lab Adv Technol Mat, Minist Educ, Chengdu 610031, Sichuan, Peoples R China
[2] SW Res Inst, San Antonio, TX USA
来源：
VACUUM | 2013年 / 89卷
关键词：
TiSiCN; CrSiCN; TiCrSiCN; Microstructure; Wear; Ti6Al4V; TITANIUM-ALLOY; COATED-CARBIDE; FILMS; WEAR; MACHINABILITY; PERFORMANCE; EVOLUTION; SILICON; SCRATCH; TOOLS;
D O I：
10.1016/j.vacuum.2012.03.053
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Three kinds of hard coatings, TiSiCN, TiCrSiCN and CrSiCN were deposited on WC/Co alloys by plasma enhanced magnetron sputtering (PEMS) technique. Those coatings were comparatively studied with respect to their microstructure and mechanical properties. The sliding tribological behaviour of the coatings against Ti6Al4V counterpart was also studied by pin-on-disc tests. The results indicated that TIN and CrN were the main phase composition for the TiSiCN and CrSiCN coatings, respectively. While the TiCrSiCN coating consisted of TiCrN2 phases or Cr be incorporated in TIN as a single solid solution. The TiCrSiCN coating showed higher hardness than the CrSiCN coating, better adhesion with substrate than the TiSiCN coating, and higher dry sliding wear resistance against the Ti6Al4V counterpart than both TiSiCN and CrSiCN coatings. (C) 2012 Published by Elsevier Ltd.
引用
收藏
页码：168 / 173
页数：6
相关论文
共 50 条
[41]   Microstructure and Properties of Coating of FeAlCuCrCoMn High Entropy Alloy Deposited by Direct Current Magnetron Sputtering [J].
Li, Xiaochun ;
Zheng, Zuoyun ;
Dou, Dan ;
Li, Jianchen .
MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS, 2016, 19 (04) :802-806
[42]   Microstructure and Properties of WB2/Cr Multilayer Films with Different Bilayer Numbers Deposited by Magnetron Sputtering [J].
Shi, W. B. ;
Liu, Y. M. ;
Li, W. H. ;
Li, T. ;
Lei, H. ;
Gong, J. ;
Sun, C. .
ACTA METALLURGICA SINICA-ENGLISH LETTERS, 2022, 35 (04) :693-702
[43]   Microstructure, mechanical and tribological properties of Cr1-xAlxN films deposited by pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS) [J].
Lin, J. ;
Mishra, B. ;
Moore, J. J. ;
Sproul, W. D. .
SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07) :4329-4334
[44]   Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering [J].
Chen, Jianmin ;
Wang, Yongjun ;
Li, Hongxuan ;
Ji, Li ;
Wu, Yanxia ;
Lv, Yanhong ;
Liu, Xiaohong ;
Fu, Yingying ;
Zhou, Huidi .
TRIBOLOGY LETTERS, 2013, 49 (01) :47-59
[45]   Microstructure and Tribological Properties of Laser Melting Deposited Ti-6Al-4V Coating on Cu-Cr-Zr Substrate [J].
Xie, Shiqiang ;
Huang, Changlin ;
Ding, Chaoyi ;
Wen, Yan ;
Wang, Liqiang ;
Xie, Lechun ;
Hua, Lin .
ADVANCED ENGINEERING MATERIALS, 2025, 27 (13)
[46]   Structural, Mechanical and Tribological Properties of NbCN-Ag Nanocomposite Films Deposited by Reactive Magnetron Sputtering [J].
Wu, Fanjing ;
Yu, Lihua ;
Ju, Hongbo ;
Asempah, Isaac ;
Xu, Junhua .
COATINGS, 2018, 8 (02)
[47]   Nitrogen Contents on Tribological Properties of Magnetron Sputtered SICN Coatings [J].
TIETUN SUN .
材料热处理学报, 2004, (05) :854-857
[48]   Nitrogen contents on tribological properties of magnetron sputtered SiCN coatings [J].
Sun, TT ;
Fu, YQ ;
Wei, J ;
Du, HJ .
14TH CONGRESS OF INTERNATIONAL FEDERATION FOR HEAT TREATMENT AND SURFACE ENGINEERING, VOLS 1 and 2, PROCEEDINGS, 2004, :854-857
[49]   Mechanical and tribological properties of nanostructured TiAlN/TaN coatings deposited by DC magnetron sputtering [J].
Contreras Romero, Elbert ;
Hurtado Macias, Abel ;
Mendez Nonell, Juan ;
Solis Canto, Oscar ;
Gomez Botero, Maryory .
SURFACE & COATINGS TECHNOLOGY, 2019, 378
[50]   Effect of Boron and Oxygen on the Structure and Properties of Protective Decorative Cr-Al-Ti-N Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering (CFUBMS) [J].
Kiryukhantsev-Korneev, Ph, V ;
Amankeldina, Zh S. ;
Sheveyko, A. N. ;
Vorotilo, S. ;
Levashov, E. A. .
APPLIED SCIENCES-BASEL, 2019, 9 (22)
12345