Microstructure and tribological properties of Ti(Cr)SiCN coating deposited by plasma enhanced magnetron sputtering

被引：33
作者：
Li, Qiang [1 ]
Jiang, Fan-qing [1 ]
Leng, Yong-xiang [1 ]
Wei, Rong-hua [2 ]
Huang, Nan [1 ]
机构：
[1] SW Jiaotong Univ, Key Lab Adv Technol Mat, Minist Educ, Chengdu 610031, Sichuan, Peoples R China
[2] SW Res Inst, San Antonio, TX USA
来源：
VACUUM | 2013年 / 89卷
关键词：
TiSiCN; CrSiCN; TiCrSiCN; Microstructure; Wear; Ti6Al4V; TITANIUM-ALLOY; COATED-CARBIDE; FILMS; WEAR; MACHINABILITY; PERFORMANCE; EVOLUTION; SILICON; SCRATCH; TOOLS;
D O I：
10.1016/j.vacuum.2012.03.053
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Three kinds of hard coatings, TiSiCN, TiCrSiCN and CrSiCN were deposited on WC/Co alloys by plasma enhanced magnetron sputtering (PEMS) technique. Those coatings were comparatively studied with respect to their microstructure and mechanical properties. The sliding tribological behaviour of the coatings against Ti6Al4V counterpart was also studied by pin-on-disc tests. The results indicated that TIN and CrN were the main phase composition for the TiSiCN and CrSiCN coatings, respectively. While the TiCrSiCN coating consisted of TiCrN2 phases or Cr be incorporated in TIN as a single solid solution. The TiCrSiCN coating showed higher hardness than the CrSiCN coating, better adhesion with substrate than the TiSiCN coating, and higher dry sliding wear resistance against the Ti6Al4V counterpart than both TiSiCN and CrSiCN coatings. (C) 2012 Published by Elsevier Ltd.
引用
收藏
页码：168 / 173
页数：6
相关论文
共 50 条
[21]   EVALUATION OF TRIBOLOGICAL AND MECHANICAL PROPERTIES OF CrC COATINGS DEPOSITED BY RF MAGNETRON SPUTTERING [J].
Gomez, Maryory ;
Lousa, Arturo ;
Esteve, Joan .
DYNA-COLOMBIA, 2010, 77 (162) :115-124
[22]   Microstructure and Tribological Behavior of Cr-Cu-N Coatings Deposited by Ion Beam Assisted Magnetron Sputtering [J].
Tian Linhai ;
Zhang Yang ;
Yang Yaojun ;
Zhu Xiaodong ;
Tang Bin .
RARE METAL MATERIALS AND ENGINEERING, 2012, 41 :355-358
[23]   Microstructure, mechanical and tribological properties of TiCN nanocomposite films deposited by DC magnetron sputtering [J].
Chen, R. ;
Tu, J. P. ;
Liu, D. G. ;
Mai, Y. J. ;
Gu, C. D. .
SURFACE & COATINGS TECHNOLOGY, 2011, 205 (21-22) :5228-5234
[24]   Tribological and electrochemical performances of Cr/CrN and Cr/CrN/CrAlN multilayer coatings deposited by RF magnetron sputtering [J].
Beliardouh, N. E. ;
Bouzid, K. ;
Nouveau, C. ;
Tlili, B. ;
Walock, M. J. .
TRIBOLOGY INTERNATIONAL, 2015, 82 :443-452
[25]   Mechanical and Tribological Properties of Ta-Cr-N Films with Different Cr Contents Deposited by Reactive Magnetron Sputtering [J].
Liu Xing ;
Ma Guojia ;
Zhang Lin ;
Sun Gang ;
Duan Yuping ;
Liu Shunhua .
RARE METAL MATERIALS AND ENGINEERING, 2012, 41 :777-780
[26]   Effects of Substrate Temperature on Microstructure and Tribological Properties of Ti-Al-Si-Cu-N Films Deposited by Magnetron Sputtering [J].
Feng Changjie ;
Chen En .
RARE METAL MATERIALS AND ENGINEERING, 2017, 46 (06) :1497-1502
[27]   Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs [J].
Wen, Xinyu ;
Lai, Zhenguo ;
Zhang, Bin ;
Wang, Xin ;
Wang, Yuan Yuan ;
Gao, Kaixiong ;
Tao, Caihong .
SURFACE AND INTERFACE ANALYSIS, 2022, 54 (09) :933-943
[28]   Effect of microstructure on mechanical and tribological properties of TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering [J].
Wu, Z. L. ;
Li, Y. G. ;
Wu, B. ;
Lei, M. K. .
THIN SOLID FILMS, 2015, 597 :197-205
[29]   Microstructure and tribological properties of GLC/MoS2 composite films deposited by magnetron sputtering [J].
Wang, Xin ;
Wang, Tao ;
Ye, Man ;
Wang, Li ;
Zhang, Guojun .
DIAMOND AND RELATED MATERIALS, 2019, 98
[30]   Study on microstructure and tribological properties of AlSn films deposited via magnetron sputtering ion plating [J].
Guo, Qiao-qin ;
Guo, Yong-chun ;
Yang, Zhong ;
Li, Jian-ping ;
Xu, Guang-tao .
APPLIED SURFACE SCIENCE, 2019, 483 :123-132
12345