Kinetic inductance as a microwave circuit design variable by multilayer fabrication

被引：5

作者：

Adamyan, A. A. ^{[1
]}

de Graaf, S. E. ^{[2
]}

Kubatkin, S. E. ^{[1
]}

Danilov, A. V. ^{[1
]}

机构：

[1] Chalmers, Dept Microtechnol & Nanosci, SE-41296 Gothenburg, Sweden

[2] Natl Phys Lab, Teddington TW11 0LW, Middx, England

来源：

SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 2015年 / 28卷 / 08期

关键词：

superconducting circuit; kinetic inductance; microwave engineering; microfabrication; WAVE PARAMETRIC-AMPLIFIER; BAND;

D O I：

10.1088/0953-2048/28/8/085007

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on the development of a reliable NbN/Al/Nb/NbN multilayer fabrication technique for combining design elements with and without kinetic inductance in superconducting microwave circuits. As a proof-of-concept we demonstrate the application of the proposed technique to build a slow microwave propagation line matched to 50 Omega terminals. Fabrication details along with the design and measurements are discussed. At 8 GHz the presented device operates as a dc controllable full-turn phase shifter. We suggest that by exploiting the kinetic inductance as a design variable one can greatly improve operation parameters for a variety of standard microwave designs such as step-impedance filters and resonators.

引用

页数：7

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