The direct evidence of the composition pulling effect and its role in InGaN multiple quantum wells

被引:11
作者
Ben, Yuhao [1 ,2 ]
Liang, Feng [1 ]
Zhao, Degang [1 ,3 ]
Yang, Jing [1 ]
Chen, Ping [1 ]
Liu, Zongshun [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
[3] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
来源
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T | 2022年 / 21卷
基金
中国国家自然科学基金;
关键词
Composition pulling effect; InGaN; GaN MQW; In-rich sublayer; Indium aggregation; GAN; PERFORMANCE; GROWTH; STRAIN; LAYERS;
D O I
10.1016/j.jmrt.2022.10.076
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Direct evidence of composition pulling effect (CPE) in InGaN' quantum wells was obtained by combining energy dispersive x-ray spectrometry (EDS) and scanning tunneling electron microscope (STEM). The indium content increases along the c-axis in the InGaN quantum wells, forming an In-rich sublayer on the surface. The indium content in the In-rich sub -layer will reach saturation earlier. After that, the incorporation of indium atoms is hin-dered, resulting in a decrease in the average indium composition in the InGaN quantum wells. Moreover, an aggregation behavior of indium atoms has been observed in samples with a stronger CPE. This leads to a lot of dark spot defects, seriously deteriorating the luminescence quality. By restricting the migration ability of indium atoms, dark spot de-fects could be greatly suppressed, and a higher quality InGaN/GaN MQW with higher in-dium content was obtained. (c) 2022 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).
引用
收藏
页码:2228 / 2237
页数:10
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