Characterization of the well-aligned ZnO nanorod structure on a pulsed laser deposited AlZnO seed layer

被引:11
作者
Lin, Chia-Feng [1 ]
Lin, Ming-Shiou [1 ]
Chen, Chi-Chi [1 ]
Tsai, Peng-Han [1 ]
Wang, Fang-Hsing [2 ,3 ]
机构
[1] Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 402, Taiwan
[2] Natl Chung Hsing Univ, Dept Elect Engn, Taichung 402, Taiwan
[3] Natl Chung Hsing Univ, Grad Inst Optoelect Engn, Taichung 402, Taiwan
关键词
ZnO nanorod; Pulsed laser deposition; AZO seed layer; LIGHT-EMITTING-DIODES; NANOWIRES; TEMPERATURE; GROWTH;
D O I
10.1016/j.surfcoat.2012.07.020
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
ZnO nanorod structures on InGaN light-emitting diode (LED) structures were grown by inserting the aluminum zinc oxide (AZO) seed layers through a sputtering and a pulsed laser deposition (PLD) processes. The well-aligned ZnO nanorods on the PLD-AZO seed layer had a higher crystalline quality and a preferred orientation along (002) plane because the X-ray intensity of (002) peak was stronger than that of (100) and (101) peaks. The inter-planar spacing in a high resolution transmission electron microscopy image is approximately 0.26 nm corresponding to (002) plane of the ZnO nanorod structure. The strong photoluminescence intensity of the ZnO nanorods on the PLD-AZO seed layer was observed at 378 nm. The light output power had a 54% enhancement for the InGaN LEDs with the ZnO nanorod structures on the PLD-AZO seed layer compared with a conventional LED structure. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:161 / 165
页数:5
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