Partially fluorinated propylene carbonate (3-trifluoromethyl-2,5-dioxacyclopentan-1-one, TFPC) is a novel battery solvent that has a high stability against oxidation. In addition, lithium intercalation into graphite is possible in TFPC solution, although TFPC has a structure similar to propylene carbonate OPC). In order to clarify the surface film formation on graphite anode, the basal plane of highly oriented pyrolytic graphite (HOPG) in TFPC was observed with an electrochemical scanning tunnelling microscope. Observed morphology changes were compared with those in ethylene carbonate (EC)-based solutions and PC, and the mechanism of surface film formation in TFPC was discussed.