The effect of thermal conductivity of the tool electrode in spark-assisted chemical engraving gravity-feed micro-drilling

被引：37
|
作者：
Mousa, M. [1 ]
Allagui, A. [1 ]
Ng, H. D. [1 ]
Wuthrich, R. [1 ]
机构：
[1] Concordia Univ, Dept Mech & Ind Engn, Montreal, PQ H3G 1M8, Canada
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2009年 / 19卷 / 01期
基金：
加拿大自然科学与工程研究理事会;
关键词：
GLASS; SACE;
D O I：
10.1088/0960-1317/19/1/015010
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Spark-assisted chemical engraving (SACE) is a non-traditional micro-machining technology based on electrochemical discharge phenomena. In SACE gravity-feed micro-drilling, various parameters including the thermal properties of the tool electrode play a significant role in the process. Based on a series of experiments using tool electrodes with different thermal properties, the effect in SACE gravity-feed micro-drilling is discussed. It is demonstrated that machining with higher thermal conductivity tool electrodes results in faster machining during the discharge regime and slower machining during the hydrodynamic regime of SACE gravity-feed micro-drilling.
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页数：7
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