Electron scattering cross section measurements in a variable pressure scanning electron microscope

Scattering of the incident electron beam in the variable pressure scanning electron microscope (VPSEM) affects the ability to perform quantitative chemical measurements. However, the manner in which the sum of the elastic and inelastic scattering cross sections varies as a function of gas type and accelerating voltage in the VPSEM is not well understood. A dual Faraday cup was constructed to measure the scattered fraction of the primary beam as a function of gas pressure, working distance, and accelerating voltage in air, water vapor, and argon environments. Experimentally measured values of the scattering cross section agree with previous experimental work, and agree within a factor of two with those values calculated carefully from theory. (C) 2012 Published by Elsevier Ltd.