Three-dimensional dry/wet contact analysis of multilayered elastic/plastic solids with rough surfaces

Friction/stiction and wear are among the main issues in microelectromechanical systems (MEMS/NEMS) devices having contact interfaces. Relevant parameters, i.e., layers thickness, need to be optimized. The contact analyses of multilayered structure under both do, and wet conditions are necessary to optimize these parameters. This study presents a first attempt to perform three-dimensional contact analysis of multilayered solids with rough surfaces in both dry and wet conditions. The surface displacements and contact pressure distributions are obtained based on variational principle with fast Fourier transform scheme. The effective hardness is modeled and plays a role when the local displacement meets the maximum displacement criterion. Simulations are performed to obtain the contact pressures, fractional total contact area, fractional plastic contact area, surface/ subsurface stresses. Relative meniscus forces are obtained with the presence of an ultrathin liquid film for different loads and layers properties. These contact statistics and meniscus forces are analyzed to study the effects of layer-to-substrate ratios of stiffness and hardness, and the layers thickness of rough, two-layered elastic/plastic solids. The methods to decrease friction/stiction and wear are investigated, and the optimum layer parameters are identified.