共 224 条
[12]
Determination of pore size distribution in thin films by ellipsometric porosimetry
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2000, 18 (03)
:1385-1391
[20]
Precision material modification and patterning with He ions
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2009, 27 (06)
:2755-2758