Atom probe tomography

被引：195

作者：

Miller, M. K. ^{[1
]}

Forbes, R. G. ^{[2
]}

机构：

[1] Oak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37871 USA

[2] Univ Surrey, Fac Engn & Phys Sci, Adv Technol Inst, Surrey GU2 7XH, England

来源：

MATERIALS CHARACTERIZATION | 2009年 / 60卷 / 06期

关键词：

Atom probe tomography; Field evaporation; Field ion microcopy; FIELD-EVAPORATION; INTERFACIAL EXCESS; RECONSTRUCTION; MICROSCOPY; DEPENDENCE; MECHANISMS; SOLUTE;

D O I：

10.1016/j.matchar.2009.02.007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This introductory tutorial describes the technique of atom probe tomography for materials characterization at the atomic level. The evolution of the technique from the initial atom probe field ion microscope to today's state-of-the-art three dimensional atom probe is outlined. An introduction is presented on the basic physics behind the technique, the operation of the instrument, and the reconstruction of the three-dimensional data. The common methods for analyzing the three-dimensional atom probe data, including atom maps, isoconcentration surfaces, proximity histograms, maximum separation methods, and concentration frequency distributions, are described. (C) 2009 Elsevier Inc. All rights reserved.

引用

页码：461 / 469

页数：9

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