Sintering of Copper Particles for Die Attach

被引:61
作者
Kaehler, Julian [1 ]
Heuck, Nicolas [1 ,2 ]
Wagner, Alexander [1 ]
Stranz, Andrej [1 ]
Peiner, Erwin [1 ]
Waag, Andreas [1 ]
机构
[1] Tech Univ Carolo Wilhelmina Braunschweig, Inst Halbleitertech, D-38106 Braunschweig, Germany
[2] Infineon Technol AG, D-85579 Neubiberg, Germany
来源
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY | 2012年 / 2卷 / 10期
关键词
Copper; electronics packaging; nanoparticles; semiconductor device packaging; SILVER PASTE;
D O I
10.1109/TCPMT.2012.2201940
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
First steps are taken toward a low-cost alternative to silver sintering as a highly reliable die attach technology for deep drilling applications and future power electronic modules. In this feasibility analysis, we evaluate sintering of copper particles for die attach. Particulate copper pastes are pretreated in H-2 atmosphere (50 mbar) in order to gain oxide-free particles. Subsequently, particles are sintered at a pressure of 40 N/mm(2) and a temperature of 350 degrees C for 2 min. Porosity, Young's modulus as well as electrical and thermal conductivities of sintered layers are analyzed. Moreover, shear tests at ambient temperature are performed for evaluating the adhesion of monometallic as well as Cu-Au bonds according to the American military standard for chip-substrate contacts (MIL-STD-883H, method 2019.8).
引用
收藏
页码:1587 / 1591
页数:5
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