Increased mobility for layer-by-layer transferred chemical vapor deposited graphene/boron-nitride thin films

被引:21
|
作者
Nayfeh, Osama M. [1 ]
Birdwell, A. Glen [1 ]
Tan, Cheng [1 ]
Dubey, Madan [1 ]
Gullapalli, Hemtej [2 ]
Liu, Zheng [2 ]
Reddy, Arava Leela Mohana [2 ]
Ajayan, Pulickel M. [2 ]
机构
[1] USA, Res Lab ARL, SEDD, Adelphi, MD 20783 USA
[2] Rice Univ, Dept Mech Engn & Mat Sci, Houston, TX 77005 USA
关键词
BORON-NITRIDE; HIGH-QUALITY; SCATTERING; TRANSPORT;
D O I
10.1063/1.4794533
中图分类号
O59 [应用物理学];
学科分类号
摘要
Large-area chemical vapor deposited graphene/boron-nitride (G/BN) thin films are co-transferred layer-by-layer to silicon-di-Oxide (SiO2) substrates, and transistors are constructed and examined. Raman spectra and high resolution transmission electron microscopy imaging show films of high quality. The graphene/boron-nitride/SiO2 devices have a significantly increased peak electron/hole mobility of 3400/2200 cm(2)/Vs with a reduced effective doping density over reference graphene/SiO2 devices. The mobility dependence as a function of carrier density is compared with a physically based empirical model and is in agreement with the improvements due to a consistent reduction in the substrate induced phonon and impurity scattering and an improvement in the overall surface quality owed to the boron-nitride interlayer that separates the graphene from the SiO2. Large-area G/BN thin films are promising for future high performance thin film electronic devices. [http://dx.doi.org/10.1063/1.4794533]
引用
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页数:3
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