Influence of reacting gas content on structural and electro-physical properties of nanostructured diamond films grown by chemical vapor deposition with crossed E/H field glow discharge stabilization

被引：2
作者：
Nasieka, Iurii [1 ]
Strelchuk, Victor [1 ]
Stubrov, Yuriy [1 ]
Dudnik, Stanislav [2 ]
Koshevoy, Konstantin [2 ]
Strel'nitskij, Vladimir [2 ]
机构：
[1] NAS Ukraine, V Ye Lashkaryov Inst Semicond Phys, 45 Pr Nauky, UA-03028 Kiev, Ukraine
[2] Kharkov Inst Phys & Technol, Natl Sci Ctr, 1 Akad Skaya St, UA-61108 Kharkov, Ukraine
来源：
THIN SOLID FILMS | 2016年 / 616卷
关键词：
Diamond films; Chemical vapor deposition (CVD); Atomic force microscopy (AFM); Scanning electron microscopy (SEM); Micro -Raman scattering (mu-RS); Photoluminescence (PL); RAMAN-SPECTROSCOPY; ULTRANANOCRYSTALLINE DIAMOND; CARBON; NANODIAMOND; SPECTRA; NUCLEATION; CENTERS;
D O I：
10.1016/j.tsf.2016.08.038
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The method and setup for polycrystalline diamond films deposition from the gas-phase using the direct current (DC) glow discharge stabilized by crossed E/H field are presented. The mentioned method was used for the preparation of nanostructured diamond films. The nanostructure formation was realized by N-2 addition to Ar/CH4/H-2 plasma. The detailed study of electro-physical, morphological and structural properties was done using simple two-electrodes scheme of resistivity measurements, atomic force and scanning electron microscopies as well as Raman spectroscopy. The data of electro-physical measurements is in good correlation with the data of optical measurements and complement each other showing the complete picture of the processes of modification of the diamond films structure induced by nitrogen atoms incorporation. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码：297 / 302
页数：6
相关论文
共 31 条
  • [1] Predicting the distribution and stability of photoactive defect centers in nanodiamond biomarkers
    Barnard, A. S.
    Vlasov, I. I.
    Ralchenko, V. G.
    [J]. JOURNAL OF MATERIALS CHEMISTRY, 2009, 19 (03) : 360 - 365
  • [2] Interpretation of the Raman spectra of ultrananocrystalline diamond
    Birrell, J
    Gerbi, JE
    Auciello, O
    Gibson, JM
    Johnson, J
    Carlisle, JA
    [J]. DIAMOND AND RELATED MATERIALS, 2005, 14 (01) : 86 - 92
  • [3] Optical properties of nanocrystalline diamond/amorphous carbon. composite films
    Boycheva, S
    Popov, C
    Kulisch, W
    Bulir, J
    Piegari, A
    Bulir, J
    [J]. FULLERENES NANOTUBES AND CARBON NANOSTRUCTURES, 2005, 13 : 457 - 469
  • [4] Strong Narrow-Band Luminescence from Silicon-Vacancy Color Centers in Spatially Localized Sub-10 nm Nanodiamond
    Catledge, Shane A.
    Singh, Sonal
    [J]. ADVANCED SCIENCE LETTERS, 2011, 4 (02) : 512 - 515
  • [5] CHALKER PR, 1991, NATO ADV SCI I B-PHY, V266, P127
  • [6] Enhancement of field emission properties in nanocrystalline diamond films upon 100 MeV silver ion irradiation
    Chen, Huang-Chin
    Palnitkar, Umesh
    Sundaravel, Balakrishnan
    Lin, I-Nan
    Singh, Abhinav Pratap
    Ranade, Ravi Kumar
    [J]. DIAMOND AND RELATED MATERIALS, 2009, 18 (2-3) : 164 - 168
  • [7] Observation of sp3 bonding in tetrahedral amorphous carbon using visible Raman spectroscopy
    Chen, ZY
    Zhao, JP
    Yano, T
    Ooie, T
    Yoneda, M
    Sakakibara, J
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 88 (05) : 2305 - 2308
  • [8] Characterization of amorphous and nanocrystalline carbon films
    Chu, PK
    Li, LH
    [J]. MATERIALS CHEMISTRY AND PHYSICS, 2006, 96 (2-3) : 253 - 277
  • [9] Davies G., 2007, J PHYS C SOLID STATE, V12, P2551
  • [10] Nano- and micro-crystalline diamond growth by MPCVD in extremely poor hydrogen uniform plasmas
    Fernandes, A. J. S.
    Neto, M. A.
    Almeida, F. A.
    Silva, R. F.
    Costa, F. M.
    [J]. DIAMOND AND RELATED MATERIALS, 2007, 16 (4-7) : 757 - 761
1234