共 5 条
High spatial resolution graded-gap AlxGa1-xAs X-ray detector
被引:14
作者:
Silenas, Aldis
[1
]
Pozela, Juras
[1
]
Pozela, Karolis
[1
]
Dapkus, Leonas
[1
]
Juciene, Vida
[1
]
机构:
[1] Lithuania Acad Sci, Inst Semicond Phys, LT-01108 Vilnius, Lithuania
来源:
关键词:
X-ray detectors;
graded-gap AlxGa1-xAs structures;
D O I:
10.1016/j.nima.2006.01.059
中图分类号:
TH7 [仪器、仪表];
学科分类号:
0804 ;
080401 ;
081102 ;
摘要:
Spatial resolution of two types of graded-gap AlxGa1-xAs X-ray detectors, p(+)-AlxGa1-xAs layer (A type) and lp-AlxGa1-xAs-p(+)-GaAs-p-AlxGa1-xAs structure (B-type), is investigated. Two processes, the diffusion of generated charge and broadening of light beam, cause blurring of X-ray image in the detectors. Optical broadening of light beam was eliminated in B-type structure. The value of spatial resolution mainly depends on the thickness of graded-gap AlxGa1-xAs layer. Spatial resolution of 10 LP/mm for the A-type structure of 50 mu m thickness and 25 LP/mm for B-type structure of 18 mu m thickness was experimentally observed. (c) 2006 Elsevier B.V. All rights reserved.
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页码:21 / 23
页数:3
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