Envelope method application of AZO thin films

被引:1
|
作者
Xu, Ying [1 ]
Ma, Penghua [1 ]
Liu, Moning [1 ]
机构
[1] Hebei United Univ, Mat Sci & Engn Coll, Hebei Prov Key Lab Inorgan Nonmetall Mat, Tangshan 063009, Hebei, Peoples R China
来源
MATERIALS, MECHANICAL ENGINEERING AND MANUFACTURE, PTS 1-3 | 2013年 / 268-270卷
关键词
atmospheric pressure chemical vapor deposition; Al-doped ZnO thin films; envelope method; OPTICAL-CONSTANTS; THICKNESS;
D O I
10.4028/www.scientific.net/AMM.268-270.202
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The AZO thin films had been prepared on glass substrates by APCVD process. The transmittance spectra of AZO thin films was measured with S-600 UV-Vis spectrophotometer. The visible light transmittance values of AZO thin films are about 85% and the thickness of the thin films well-distributed by the transmittance spectra of AZO films. Using the envelope method, the film thickness d is calculated about 964.43nm and the discrepancy is only 0.56% compared with the result of instrument measurements. The curve about the refractive index n with the incident wavelength is consistent with the reported literature results. The envelope method is suitable for the optical constants processing of some similar AZO films where exist weak absorption ranges (T >= 0.4).
引用
收藏
页码:202 / 206
页数:5
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