Temperature coefficient of resistance and thermal conductivity of Vanadium oxide 'Big Mac' sandwich structure

被引：35

作者：

Abdel-Rahman, M. ^{[1
]}

Ilahi, S. ^{[2
]}

Zia, M. F. ^{[1
]}

Alduraibi, M. ^{[3
,4
]}

Debbar, N. ^{[5
]}

Yacoubi, N. ^{[2
]}

Ilahi, B. ^{[3
]}

机构：

[1] King Saud Univ, PSATRI, Riyadh 11421, Saudi Arabia

[2] Univ Carthage, Unite Rech Caracterisat Photo Therm IPEIN, Carthage, Tunisia

[3] King Saud Univ, Dept Phys & Astron, Coll Sci, Riyadh 11451, Saudi Arabia

[4] KACST, Natl Ctr Appl Phys, Riyadh 11442, Saudi Arabia

[5] King Saud Univ, Coll Engn, Dept Elect Engn, Riyadh 11421, Saudi Arabia

来源：

INFRARED PHYSICS & TECHNOLOGY | 2015年 / 71卷

关键词：

Vanadium oxide; Thermal conductivity; Photo-thermal deflection; Temperature coefficient of resistance; Microbolometer; THIN-FILM; MICROBOLOMETER; FABRICATION; V2O5;

D O I：

10.1016/j.infrared.2015.03.006

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper, we synthesize and characterize a thin film thermometer structure for infrared microbolometers. The structure is composed of alternating multilayers of Vanadium pentoxide (V2O5), 25 nm, and Vanadium (V), 5 nm, thin films deposited by rf magnetron and dc magnetron sputtering respectively and annealed for 20,30 and 40 min at 300 degrees C in Nitrogen (N-2) atmosphere. The best achieved temperature coefficient of resistance (TCR) was found to be -2.57%/K for 40 min annealed samples. Moreover, we apply, for the first time, the photo-thermal deflection (PTD) technique for measuring the thermal conductivity of the synthesized thin films. The thermal conductivity of the developed thin films reveals an increase in thermal conductivity from 2 W/m K to 5.8 W/m K for as grown and 40 min annealed samples respectively. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：127 / 130

页数：4

共 23 条

[21] Nano-vanadium oxide thin films in mixed phase for microbolometer applications [J].