Temperature dependence of DC transport characteristics for a two-dimensional electron gas in an undoped Si/SiGe heterostructure

被引:10
作者
Chou, Kuan-Yu [1 ]
Hsu, Nai-Wen [1 ]
Su, Yi-Hsin [1 ]
Chou, Chung-Tao [2 ]
Chiu, Po-Yuan [2 ]
Chuang, Yen [1 ]
Li, Jiun-Yun [1 ,2 ,3 ]
机构
[1] Natl Taiwan Univ, Grad Inst Elect Engn, Taipei 10617, Taiwan
[2] Natl Taiwan Univ, Dept Elect Engn, Taipei 10617, Taiwan
[3] Natl Nano Device Labs, Hsinchu 30078, Taiwan
关键词
FIELD-EFFECT TRANSISTORS; THRESHOLD VOLTAGE; MOBILITY; CHANNEL; MOSFETS; SI;
D O I
10.1063/1.5018636
中图分类号
O59 [应用物理学];
学科分类号
摘要
We investigate DC characteristics of a two-dimensional electron gas (2DEG) in an undoped Si/SiGe heterostructure and its temperature dependence. An insulated-gate field-effect transistor was fabricated, and transfer characteristics were measured at 4 K-300 K. At low temperatures (T < 45 K), source electrons are injected into the buried 2DEG channel first and drain current increases with the gate voltage. By increasing the gate voltage further, the current saturates followed by a negative transconductance observed, which can be attributed to electron tunneling from the buried channel to the surface channel. Finally, the drain current is saturated again at large gate biases due to parallel conduction of buried and surface channels. By increasing the temperature, an abrupt increase in threshold voltage is observed at T similar to 45 K and it is speculated that negatively charged impurities at the Al2O3/Si interface are responsible for the threshold voltage shift. At T > 45 K, the current saturation and negative transconductance disappear and the device acts as a normal transistor. Published by AIP Publishing.
引用
收藏
页数:4
相关论文
共 18 条
  • [1] Pauli spin blockade in undoped Si/SiGe two-electron double quantum dots
    Borselli, M. G.
    Eng, K.
    Croke, E. T.
    Maune, B. M.
    Huang, B.
    Ross, R. S.
    Kiselev, A. A.
    Deelman, P. W.
    Alvarado-Rodriguez, I.
    Schmitz, A. E.
    Sokolich, M.
    Holabird, K. S.
    Hazard, T. M.
    Gyure, M. F.
    Hunter, A. T.
    [J]. APPLIED PHYSICS LETTERS, 2011, 99 (06)
  • [2] The temperature-dependence of threshold voltage of n-MOSFETs with nonuniform substrate doping
    Chen, HH
    Tseng, SH
    Gong, J
    [J]. SOLID-STATE ELECTRONICS, 1998, 42 (10) : 1799 - 1805
  • [3] THE N-CHANNEL SIGE/SI MODULATION-DOPED FIELD-EFFECT TRANSISTOR
    DAEMBKES, H
    HERZOG, HJ
    JORKE, H
    KIBBEL, H
    KASPAR, E
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (05) : 633 - 638
  • [4] Schottky gating high mobility Si/Si1-xGex 2D electron systems
    Dunford, RB
    Griffin, N
    Paul, DJ
    Pepper, M
    Robbins, DJ
    Churchill, AC
    Leong, WY
    [J]. THIN SOLID FILMS, 2000, 369 (1-2) : 316 - 319
  • [5] LOW-TEMPERATURE ELECTRICAL CHARACTERIZATION OF METAL-NITRIDED OXIDE-SILICON FIELD-EFFECT TRANSISTORS
    EMRANI, A
    GHIBAUDO, G
    BALESTRA, F
    PIOT, B
    THIRION, V
    STRABONI, A
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 73 (10) : 5241 - 5253
  • [6] TEMPERATURE-DEPENDENCE OF THRESHOLD VOLTAGE IN THIN-FILM SOI MOSFETS
    GROESENEKEN, G
    COLINGE, JP
    MAES, HE
    ALDERMAN, JC
    HOLT, S
    [J]. IEEE ELECTRON DEVICE LETTERS, 1990, 11 (08) : 329 - 331
  • [7] Screening of remote charge scattering sites from the oxide/silicon interface of strained Si two-dimensional electron gases by an intermediate tunable shielding electron layer
    Huang, Chiao-Ti
    Li, Jiun-Yun
    Chou, Kevin S.
    Sturm, James C.
    [J]. APPLIED PHYSICS LETTERS, 2014, 104 (24)
  • [8] HIGH-TRANSCONDUCTANCE N-TYPE SI/SIGE MODULATION-DOPED FIELD-EFFECT TRANSISTORS
    ISMAIL, K
    MEYERSON, BS
    RISHTON, S
    CHU, J
    NELSON, S
    NOCERA, J
    [J]. IEEE ELECTRON DEVICE LETTERS, 1992, 13 (05) : 229 - 231
  • [9] EXTREMELY HIGH-ELECTRON-MOBILITY IN SI/SIGE MODULATION-DOPED HETEROSTRUCTURES
    ISMAIL, K
    ARAFA, M
    SAENGER, KL
    CHU, JO
    MEYERSON, BS
    [J]. APPLIED PHYSICS LETTERS, 1995, 66 (09) : 1077 - 1079
  • [10] Scattering mechanisms in shallow undoped Si/SiGe quantum wells
    Laroche, D.
    Huang, S. -H.
    Nielsen, E.
    Chuang, Y.
    Li, J. -Y.
    Liu, C. W.
    Lu, T. M.
    [J]. AIP ADVANCES, 2015, 5 (10):