On-chip silicon waveguide Bragg grating photonic temperature sensor

被引:120
|
作者
Klimov, Nikolai N. [1 ,3 ]
Mittal, Sunil [2 ,3 ,4 ]
Berger, Michaela [1 ]
Ahmed, Zeeshan [1 ]
机构
[1] NIST, Thermodynam Metrol Grp, Sensor Sci Div, Phys Measurement Lab, Gaithersburg, MD 20899 USA
[2] NIST, Quantum Opt Grp, Quantum Measurement Div, Phys Measurement Lab, Gaithersburg, MD 20899 USA
[3] Univ Maryland, Joint Quantum Inst, College Pk, MD 20742 USA
[4] Univ Maryland, Dept Elect & Comp Engn, College Pk, MD 20742 USA
关键词
RING-RESONATOR; FIBER; WAVELENGTH; CRYSTALLINE; DEPENDENCE;
D O I
10.1364/OL.40.003934
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Resistance thermometry is a time-tested method for taking temperature measurements. In recent years, fundamental limits to resistance-based approaches have spurred considerable interest in developing photonic temperature sensors as a viable alternative. In this study, we demonstrate that our photonic thermometer, which consists of a silicon waveguide integrated with a Bragg grating, can be used to measure temperature changes over the range of 5 degrees C-160 degrees C, with a combined expanded uncertainty [k = 2, 95% confidence level] of 1.25 degrees C. Computational modeling of the sensor predicts the resonance wavelength and effective refractive index within 4% of the measured value.
引用
收藏
页码:3934 / 3936
页数:3
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