Continuously-varying, three-dimensional SU-8 structures: Fabrication of inclined magnetic actuators

被引：9

作者：

Choi, Y ^{[1
]}

Kim, K ^{[1
]}

Allen, MG ^{[1
]}

机构：

[1] Georgia Inst Technol, Dept Elect & Comp Engn, Microelect Res Ctr, Atlanta, GA 30322 USA

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984233

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fabrication approach using SU-8 epoxy photoresist to create three-dimensional structures with continuous variation in the third dimension has been developed. Using this approach, a ramp structure 300 m tall with angle of inclination of 36 degrees has been fabricated. In an extension of the process, both metal and dielectric materials can be deposited and patterned on the inclined surface. The current application for these ramp structures is the fabrication of magnetic switches of well-defined inclination relative to the substrate. Such switches were produced using the ramp structures as an underlying mechanical support. Switch arrays with inclined orientation are able to actuate consistently in the same direction in response to external magnetic fields. Under magnetic actuation, the switch produced a contact resistance of 5.1 Ohms.

引用

页码：176 / 179

页数：4