共 38 条
Tribological behavior of O2 and CF4 plasma post-treated diamond-like carbon films under dry air and in a high relative humidity environment
被引:11
作者:
Jongwannasiri, C.
[1
]
Watanabe, S.
[2
]
机构:
[1] Nippon Inst Technol, Grad Sch, Saitama 3458501, Japan
[2] Nippon Inst Technol, Dept Innovat Syst Engn, Saitama 3458501, Japan
关键词:
Diamond-like carbon;
O-2 and CF4 plasma;
Tribological behavior;
Dry air;
High relative humidity;
MECHANICAL-PROPERTIES;
RECENT PROGRESS;
FRICTION;
WEAR;
COATINGS;
SURFACES;
HYDROGEN;
OXYGEN;
D O I:
10.1016/j.surfcoat.2016.05.082
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
In this article, the results obtained from a study of the plasma post-treatment of diamond-like carbon (DLC) films using O-2 and CF4 plasma are reported. The friction and wear behaviors of the films in dry air and a high relative humidity environment were characterized using ball-on-disk friction testing and an optical microscope. The results indicated that both O-2 and CF4 plasma post-treatments of DLC films had strong influences on the friction coefficient measured under dry air, which were compared with the result of the as-deposited DLC film. This effect was due to the passivation of free sigma-carbon bonds with hydroxyl (-OH) and fluorinated (-F) groups on the unoxidized surfaces of the DLC films. Furthermore, the O-2 plasma post-treated DLC films exhibited the lowest specific wear rates both in dry air and at high relative humidity, as evidenced by their small wear scars. Therefore, O-2 plasma post-treatment can be considered beneficial for improving tribological performance. (C) 2016 Elsevier B.V. All rights reserved.
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页码:200 / 204
页数:5
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