Tribological behavior of O2 and CF4 plasma post-treated diamond-like carbon films under dry air and in a high relative humidity environment

被引:11
作者
Jongwannasiri, C. [1 ]
Watanabe, S. [2 ]
机构
[1] Nippon Inst Technol, Grad Sch, Saitama 3458501, Japan
[2] Nippon Inst Technol, Dept Innovat Syst Engn, Saitama 3458501, Japan
关键词
Diamond-like carbon; O-2 and CF4 plasma; Tribological behavior; Dry air; High relative humidity; MECHANICAL-PROPERTIES; RECENT PROGRESS; FRICTION; WEAR; COATINGS; SURFACES; HYDROGEN; OXYGEN;
D O I
10.1016/j.surfcoat.2016.05.082
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this article, the results obtained from a study of the plasma post-treatment of diamond-like carbon (DLC) films using O-2 and CF4 plasma are reported. The friction and wear behaviors of the films in dry air and a high relative humidity environment were characterized using ball-on-disk friction testing and an optical microscope. The results indicated that both O-2 and CF4 plasma post-treatments of DLC films had strong influences on the friction coefficient measured under dry air, which were compared with the result of the as-deposited DLC film. This effect was due to the passivation of free sigma-carbon bonds with hydroxyl (-OH) and fluorinated (-F) groups on the unoxidized surfaces of the DLC films. Furthermore, the O-2 plasma post-treated DLC films exhibited the lowest specific wear rates both in dry air and at high relative humidity, as evidenced by their small wear scars. Therefore, O-2 plasma post-treatment can be considered beneficial for improving tribological performance. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:200 / 204
页数:5
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