Development and growth time optimization of boron-doped micro-crystalline, undoped micro-crystalline and undoped nano-crystalline composite diamond film

被引:9
作者
Wang, Xinchang [1 ]
Wang, Chengchuan [1 ]
Sun, Fanghong [1 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Mech Engn, State Key Lab Mech Syst & Vibrat, Mech Bldg B344,Dongchuan Rd 800, Shanghai 200240, Peoples R China
基金
中国博士后科学基金; 中国国家自然科学基金;
关键词
Composite diamond film; adhesion; surface hardness; surface roughness; growth time; CHEMICAL-VAPOR-DEPOSITION; CVD DIAMOND; CUTTING PERFORMANCE; RAMAN-SPECTROSCOPY; CEMENTED CARBIDE; RESIDUAL-STRESS; HOLE SURFACES; COATINGS; FABRICATION; TOOLS;
D O I
10.1177/0954405416666902
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Based on a well-designed growth procedure, a tri-material, namely, a three-layer boron-doped micro-crystalline, undoped micro-crystalline and undoped nano-crystalline composite diamond film, is deposited on the pretreated WC-6wt% Co substrate, the basic characters of which are systematically studied and compared with some other commonly used diamond films. Besides, the growth times for three respective layers are accordingly determined. It is further clarified that the underlying boron-doped micro-crystalline diamond layer can well adhere to the WC-Co substrate due to either the reduction in the residual stress or the formation of B-Co compounds. There is no doubt that the surface undoped nano-crystalline diamond layer with relatively lower hardness and initial surface roughness is more convenient to be polished to the required surface roughness. Moreover, when the growth times for the middle undoped micro-crystalline diamond layer and the surface undoped nano-crystalline diamond layer are both appropriate, the undoped micro-crystalline diamond layer with extremely high diamond quality and hardness can effectively reinforce the surface hardness of the whole composite film. Based on the discussions on the influences of the growth times for the different layers on the performance of the composite diamond film, the growth times for the boron-doped micro-crystalline diamond, undoped micro-crystalline diamond and undoped nano-crystalline diamond layers are, respectively, determined as 4, 4 and 2h. Under such conditions, the reinforcement effect of the middle layer on the surface hardness can be guaranteed, and the undoped nano-crystalline diamond grains have totally covered the undoped micro-crystalline diamond layer.
引用
收藏
页码:1244 / 1258
页数:15
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