Melt flow instability and vortex structures in Czochralski growth under steady magnetic fields

被引:4
|
作者
Gorbunov, L [1 ]
Klyukin, A [1 ]
Pedchenko, A [1 ]
Feodorov, A [1 ]
机构
[1] Latvian State Univ, Inst Phys, LV-2169 Salaspils 1, Latvia
关键词
Czochralski growing method; crystal growth; magnetic field; flow stability; vortex patterns; multi-channel measurements;
D O I
10.1016/S0196-8904(01)00104-2
中图分类号
O414.1 [热力学];
学科分类号
摘要
The hydrodynamics of melt motion in the CZ-process of silicon single crystal growth in axial and axial-radial magnetic fields is studied using a physical model. The modeling liquid is eutectics InGaSn. Most attention is paid to the problem of flow stability. A multi-channel system gathering data is used to define the pattern and dynamics of velocity disturbances. Instant spatial distributions of the electric potential induced by motion in the melt are obtained. Temporal evolution of the instant distributions in vertical and horizontal planes of the working volume is under investigation. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
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页码:317 / 326
页数:10
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