Selective etching of ZnO films on an ITO substrate using a scanning electrochemical microscope

被引:13
作者
Tang, Jing [1 ]
Zheng, Jing-Jing [1 ]
Yu, Yu-Ting [1 ]
Chen, LiNa [1 ]
Zhang, Ning [1 ]
Tian, Zhaowu [2 ]
机构
[1] Fuzhou Univ, Coll Chem & Chem Engn, Minist Educ, Key Lab Anal & Detect Technol Food Safety, Fuzhou 350108, Fujian Province, Peoples R China
[2] State Key Lab Phys Chem Solid Surfaces, Xiamen 361005, Peoples R China
基金
美国国家科学基金会;
关键词
Selective etching; SECM; ZnO; ITO; Scavenger; THIN-FILMS; DEPOSITION; KINETICS; FERROCENEMETHANOL; GENERATION; REDUCTION; PATTERNS; SILICON; ARRAY; GAAS;
D O I
10.1016/j.electacta.2012.07.106
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
A scanning electrochemical microscope (SECM) combined with an inverse optical microscope has been used in its lithographic mode to fabricate microstructures on a ZnO coated ITO substrate. The UME electrode generated the protons which served as the etchant to dissolve the ZnO film. High resolution microstructuring was achieved with the SECM after the addition of Tris(hydroxymethyl)aminomethane (Iris) to the solution. In the etching solution,Tris was used as an efficient reactant to consume the protons, so that the etchant could not diffuse far from the tip electrode. The cyclic voltammetry technique was employed to determine the appropriate potential, about 1.2 V vs. SCE, for the generation of protons at the tip electrode. The dimensions of the etched microstructures were measured using the optical microscopic images at different stages of the etching process in order to optimize the lithographic conditions. "Point by point" etching with the SECM tip was used to create the logo "FZU" of Fuzhou University on the ZnO film. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码:247 / 252
页数:6
相关论文
共 37 条
  • [11] Dynamic Template Assisted Electrodeposition of Porous ZnO Thin Films Using a Triangular Potential Waveform
    Hu, F.
    Chan, K. C.
    Yue, T. M.
    Surya, C.
    [J]. JOURNAL OF PHYSICAL CHEMISTRY C, 2010, 114 (13) : 5811 - 5816
  • [12] Effect of Supersaturation on the Growth of Zinc Oxide Nanostructured Films by Electrochemical Deposition
    Illy, B. N.
    Ingham, B.
    Ryan, M. P.
    [J]. CRYSTAL GROWTH & DESIGN, 2010, 10 (03) : 1189 - 1193
  • [13] Nanoscale Imaging of Surface Topography and Reactivity with the Scanning Electrochemical Microscope
    Laforge, Francois O.
    Velmurugan, Jeyavel
    Wang, Yixian
    Mirkin, Michael V.
    [J]. ANALYTICAL CHEMISTRY, 2009, 81 (08) : 3143 - 3150
  • [14] Well-aligned arrays of vertically oriented ZnO nanowires electrodeposited on ITO-coated glass and their integration in dye sensitized solar cells
    Lupan, O.
    Guerin, V. M.
    Tiginyanu, I. M.
    Ursaki, V. V.
    Chow, L.
    Heinrich, H.
    Pauporte, T.
    [J]. JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY A-CHEMISTRY, 2010, 211 (01) : 65 - 73
  • [15] Electrochemical micromachining of nitinol by confined-etchant-layer technique
    Ma, Xin-Zhou
    Zhang, Li
    Cao, Guo-Hui
    Lin, Yu
    Tang, Jing
    [J]. ELECTROCHIMICA ACTA, 2007, 52 (12) : 4191 - 4196
  • [16] HOLE INJECTION AND ETCHING STUDIES OF GAAS USING THE SCANNING ELECTROCHEMICAL MICROSCOPE
    MANDLER, D
    BARD, AJ
    [J]. LANGMUIR, 1990, 6 (09) : 1489 - 1494
  • [17] SCANNING ELECTROCHEMICAL MICROSCOPY - THE APPLICATION OF THE FEEDBACK MODE FOR HIGH-RESOLUTION COPPER ETCHING
    MANDLER, D
    BARD, AJ
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (10) : 3143 - 3144
  • [18] Generation of polythiophene micropatterns by scanning electrochemical microscopy
    Marck, C
    Borgwarth, K
    Heinze, J
    [J]. CHEMISTRY OF MATERIALS, 2001, 13 (03) : 747 - 752
  • [19] Scanning Electrochemical Microscopy as a Quantitative Probe of Acid-Induced Dissolution: Theory and Application to Dental Enamel
    McGeouch, Carrie-Anne
    Edwards, Martin A.
    Mbogoro, Michael M.
    Parkinson, Charles
    Unwin, Patrick R.
    [J]. ANALYTICAL CHEMISTRY, 2010, 82 (22) : 9322 - 9328
  • [20] STUDY OF SILICON ETCHING IN HBR SOLUTIONS USING A SCANNING ELECTROCHEMICAL MICROSCOPE
    MELTZER, S
    MANDLER, D
    [J]. JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS, 1995, 91 (06): : 1019 - 1024