Demands of ultra-precision machining systems have recently increased for machining three dimensional nano-geometries. Such systems require not only horizontal positioning systems but also vertical positioning systems with a nanometer positioning accuracy. However, the gravity load of moving mass negatively affects the positioning accuracy especially in a vertical positioning system. Therefore, it is necessary to compensate the influence of the gravity load for vertical ultra-precision positioning. Although the gravity compensation method using a non-contact vacuum cylinder has been proposed, it is difficult to improve the sealing performance of the non-contact seal. Thus, this study proposes the magnetic fluid seal for linear motion system with a gravity compensator. In general, magnetic fluid seals have been applied to rotary motion systems, however there are few studies on linear motion systems so far. When a magnetic fluid seal is applied to linear motion systems, the magnetic fluid leaks out of the seal clearance due to the movement, and it cannot keep the performance as a seal. In this study, it is possible to prevent leaking the magnetic fluid from the seal clearance and also to maintain the performance of the seal by holding a magnetic fluid by the two pole pieces shaped tapered tip and putting it near the piston made of non-magnetic material and coated with oil repellent layer. The proposed magnetic fluid seal performance has been evaluated. As a result, the result confirmed that the proposed magnetic fluid seal is useful as a linear motion seal, and the oil repellent layer on the piston surface can largely improve the sealing performance. (C) 2014 The Authors. Published by Elsevier B.V. This is an open access arlick under the CC BY-NC-ND license http://crettivecommons.orgdicensesly-nc-n1/4.0.0. Selection and peer-review under responsibility of the International Scientific Conunittee of "9th CIRP ICNIE Conference"
