Characteristics of electron density in ablation plasma generated from functionally graded material in excimer laser processing

被引:4
作者
Uchida, Y [1 ]
Yamada, J [1 ]
Furuhashi, H [1 ]
Uchida, Y [1 ]
机构
[1] Aichi Inst Technol, Yakusa, Toyota 4700392, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 7B期
关键词
functionally graded materials; excimer laser; laser processing; ablation plasma; electron density;
D O I
10.1143/JJAP.38.4400
中图分类号
O59 [应用物理学];
学科分类号
摘要
Functionally graded materials (FGMs), which possess the dual characteristics of two materials, are expected to be useful in industry in the near future. It is important to find a process of laser ablation when laser is used in the reprocessing of I;GM such as cutting and drilling. The electron density is one of the important parameters needed to analyze the mechanism of the ablation plasma. The characteristics of electron density in ablation plasma were estimated. A XeCl excimer laser with a wavelength of 308 nm, a maximum pulse energy of 500 mJ and a pulse duration of 30 ns was used. A Mach-Zehnder interferometer was used to measure the electron density. The electron density dependence of the ablation plasma plumes on the ceramic-metal content of FGMs was observed. The temporal and spatial profiles of the electron density were also observed.
引用
收藏
页码:4400 / 4403
页数:4
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