Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure

被引：4

作者：

Wang, Yinan ^{[1
]}

Liu, Yue ^{[1
]}

Zheng, Shu ^{[1
]}

Lin, Guoqiang ^{[1
]}

机构：

[1] Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Sch Phys & Optoelect Technol, Dalian 116023, Peoples R China

来源：

JOURNAL OF PLASMA PHYSICS | 2012年 / 78卷

关键词：

GLOW-DISCHARGES;

D O I：

10.1017/S0022377812000566

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A one-dimensional fluid model is built to study the effect of radio frequency (RF) on the characteristics of RF nitrogen discharge with induced argon plasma at high pressure. The model is solved by a finite difference method, and the numerical results are obtained. The numerical results show that by modulating driven frequency, the discharge can obtain higher plasma density. Moreover, the discharge is operated in a stable a mode in a range of 100 MHz of driven frequency.

引用

页码：673 / 676

页数：4

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