Capture cross-section of threading dislocations in thin films

被引:3
作者
Fertig, Ray S., III [1 ]
Baker, Shefford P. [1 ]
机构
[1] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
来源
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 2012年 / 551卷
基金
美国国家科学基金会;
关键词
Threading dislocations; Dislocation interactions; Thin films; Dislocation simulation; HETEROEPITAXIAL LAYERS; DENSITY REDUCTION; METAL-FILMS; ANNIHILATION; DEFORMATION; KINETICS; STRESS; MODEL;
D O I
10.1016/j.msea.2012.04.084
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The capture cross section for annihilation of two threads with opposite Burgers vectors moving on orthogonal slip planes in a thin film is examined using a numerical model. The initial configurations of threads that lead to annihilation are mapped out for a range of applied film stresses. The area of the region of initial configurations that lead to annihilation at a given stress and thickness is the capture cross-section. The size of the capture cross-section is shown to be highly sensitive to the applied stress relative to the critical stress for dislocation motion imposed by the film thickness. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:67 / 72
页数:6
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